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微机电器件设计.制造及计算机辅助设计
¥35.8(5.5折)定价:¥65.0Thisbookfirstlyintroducesthepertinentfundamentaltheory,importantmaterialandfabricationprocessofmicroGelectromechanicalsystems.Basedonthesetheories,thedesignruleandimportantengineeringexamplesaredescribedindetail.Then,ma