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Unit 1 A Brief Introduce to Microelectronic Technology 1
1£®1 History About Microelectronics 1
Text 1
Technical words and Phrases 2
Notes to the text 3
Exercises 3
1£®2 Introduction To Some Courses 5
Text 5
Technical words and Phrases 6
Notes to the text 7
Exercises 7
1£®3 Reading Materials 8
1£®4 Unit Exercises 10
Unit 2 Semiconductor Device 18
2£®1 Semiconductor Diode 18
Text 18
Technical words and Phrases 22
Notes to the text 23
Exercises 23
2£®2 Transistors 24
Text 25
Technical words and phrases 27
Notes to the text 28
Exercises 28
2£®3 Microwave and Photonic devices 30
Text 30
Technical words and Phrases 34
Notes to the text 35
Exercises 35
2£®4 Reading Materials 37
2£®5 Unit Exercises 39
Unit 3 Micro-electronic Technology 43
3£®1 Crystal Growth 43
Text 43
Technical words and Phrases 44
Notes to the text 45
Exercises 45
3£®2 Film Growth 46
Text 46
Technical words and Phrases 47
Exercises 48
3£®3 Photolithography 48
Text 49
Technical words and Phrases 50
Exercises 50
3£®4 Oxide Growth 51
Text 51
Technical words and Phrases 53
Exercises 53
3£®5 Diffusion and Ion Implantation 54
Text 54
Technical words and Phrases 56
Notes to the text 57
Exercises 57
3£®6 Etching 58
Text 58
Technical words and Phrases 60
Notes to the text 60
Exercises 61
3£®7 Reading Material 61
3£®8 Unit Exercises 64
Unit 4 Integrated Circuits 67
4£®1 Introduction of Integrated Circuits 67
Text 67
Technical words and Phrases 71
Notes to the text 72
Exercises 72
4£®2 Integrated circuit design and verification 74
Text 74
Technical words and Phrases 79
Notes to the text 80
Exercises 80
4£®3 Introduction of Cadence Tools 81
Text 81
Technical words and Phrases 94
Notes to the text 95
Exercises 95
4£®4 Reading Materials 96
4£®5 Unit Exercises 99
Unit 5 Microelectronic Mechanical Systems (MEMS) 104
5£®1 Introduction to MEMS 104
Text 104
Technical words and Phrases 106
Notes to the text 107
Exercises 107
5£®2 Materials for MEMS 108
Text 108
Technical words and Phrases 111
Notes to the text 111
Exercises 111
5£®3 Processes for Micromachining 113
Text 113
Technical words and Phrases 116
Notes to the text 116
Exercises 116
5£®4 Reading Materials 118
5£®5 Unit Exercises 119
Unit 6 Scientific and Technological Papers 123
6£®1 Film Thickness Tester 123
Text 123
Technical words and Phrases 128
Notes to the text 129
Exercises 129
6£®2 WL13A0G10 Test System Option Manual 130
Text 130
Technical words and Phrases 133
Notes to the text 133
Exercises 134
6£®3 Reading Materials 134
6£®4 Unit Exercises 137
Appendix Technical Vocabulary 141
Reference 151