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unit 1 basis of materials science 1.1 introduction 1.2 materials science and engineering1.3 classification of materials1.4 advanced materials  1.5 microstructure characterization of materials unit 2 plasmas  2.1 dc glow discharge  2.2 rf discharges 2.3 high-density plasmas  unit 3 vacuum technology 3.1 pressure ranges and vacuum pumps  3.2 vacuum seals and pressure measurement unit 4 thin film deposition  4.1 physical deposition  4.2 chemical deposition  4.3 epitaxial growth unit 5 devices fabrication process  5.1 introduction 5.2 ion implantation 5.3 photolithography5.4 etch5.5 metallization  5.6 process integration unit 6 reading practice 6.1 paper 6.2 patent6.3 manual guide unit 7 writing practice 7.1 structure of paper7.2 example 1 7.3 example 2